Titre: Selective transfer technology for Microdevice Distribution
Conférencier: Dr. Roland Guerre , IBM Zurich Research Laboratory
Lieu: École Polytechnique de Montréal , Pavillon Lassonde, Salle L-2712
Date et heure: mercredi le 23 janvier 2008 de 11:00 à 12:00

Résumé: Integration and packaging issues are one of the main obstacle for commercialization of MEMS-based microsystems. They are a major part of microsystem cost, in general even larger than the MEMS part, and new concept to address this cost issue is very important for increasing the acceptance of MEMS-based products. Wafer-level integration has received a lot of interest from the research community, resulting in the development of technologies to meet the high level of interconnect density needed such as with wafer stacking or wafer-level device integration. It is recognized that in wafer-level integration for 3D applications the requirement that the die sizes must have the same size is a serious limitation of this technology , despite the drawback of yield drop due to yield multiplication, which makes it economically attractive when the dies are small and their yield high. To cope with this limitation and the cost issue of the wafer-level integration, a generic, CMOS-compatible method at wafer-scale level enabling the distribution and integration of heterogeneous devices from one wafer to many is proposed. Hence, we combined some of the cost efficiency of Pick and Place with the high level of integration offered by wafer-level integration. The concept is based on a selective transfer of devices to create the distribution function of a fraction of costly devices from one “source” wafer, having a high device density, to populate many receiver wafers having a lower device density. Hence the cost of the transferred device is distributed over the number of wafers populated. Depending on the distribution ratio and provided that the transfer itself can be made inexpensive, the impact of the cost associated with the transferred devices may become insignificant. We believe that selective transfer is a powerful technology for heterogeneous integration of materials (i.e SMA or PZT) or devices that are unsuitable for standard monolithic fabrication in order to enable novel functionality and allow a reduction of manufacturing costs.

Note biographique: Roland Guerre received a Maitrise of Physics (1999) and a DEA of Microelectronics (2000) from the University Joseph Fourier, Grenoble, France. He joined the Swiss Federal Institute of Technology of Lausanne (EPFL) in 2001 where he received his PhD (2005) for his work on guided-wave Micro-Electro-Mechanical Systems (MEMS) optical switches for telecommunication applications. He worked as a researcher in micropower generation for IMEC Nederland/Holst Center in 2005 working on vibrational energy scavengers for autonomous wireless transducers networks. He joined IBM Zurich Research Laboratory in 2006 as postdoctoral fellow where he developped Selective transfer technology for Microdevice Distribution for heterogeneous integration.

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